Semiconductor integrated memory device.

摘要

A semiconductor integrated circuit device has a semiconductor memory cell array. The cell array includes word lines and data lines and a plurality of memory cells each provided at a cross point between one of the word lines and one of the data lines. Each memory cell has a cell selection transistor and an information storage capacitor connected in series. The cell selection transistor in one cell includes first and second doped regions (SR) formed in a main surface of a semiconductor substrate, a first insulating film (35) formed on the main surface of the semiconductor substrate between the first and second doped regions and a control electrode layer (36) formed on the first insulating film between the first and second doped regions. The first doped region is connected with a data line (55), while the control electrode is connected with a word line (36). The information storage capacitor includes a second insulating film (29) formed on the wall of one trench formed on the main surface of the semiconductor substrate, an electrode layer (30) formed on the second insulating film and serving as a first electrode of the capacitor, a dielectric film (32) formed on the electrode layer and a conducting material (33) provided to fill a space defined by the dielectric film in the trench and serving as a second electrode of the capacitor. The second doped region of the transistor terminates at the wall of the trench. A conducting layer (42) is provided to extend both on the second doped region and the conducting material in the cell to electrically interconnect them for the series connection. <IMAGE>