| 摘要 |
PURPOSE:To correct inclination of a sample easily and with a high accuracy by a method wherein one line each of scanning is performed in directions X and Y to calculate phase differences from the reflection signal and a reference position in the respective lines and inclinations of a scanning surface and a sample surface are obtained from the phase differences and directional positions to drive the sample surface for eliminating the inclination. CONSTITUTION:Oscillation continuous wave of a high frequency signal generator 9 is modulated to a burst wave with an RF switch 10 to be applied to a sample 2 through a circulator 11, an ultrasonic probe 1A and an ultrasonic lens 1 and the reflected wave thereof is ouputted to an amplifier 12 and a multiplier 15 through the probe 1A and the circulator 11. On the hand, the oscillation continuous wave is ouputted to the multiplier 15 as reference signal through a phase shifter 14 to be multiplied by a reflection signal. Then, a phase difference between the reflection signal and the reference signal is calculated with a processor 13 to determine inclination in the directions x and y from a relationship between the phase difference and a moving distance. Gonio stage drivers 5 and 6 are controlled automatically with respect to the inclination to correct the sample surface and the scanning surface parallel. |
