RESIST COATING METHOD AND DEVICE,申请号JP19910130434-传众专利搜索

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发明名称	RESIST COATING METHOD AND DEVICE
摘要
申请公布号	JPH04332117(A)	申请公布日期	1992.11.19
申请号	JP19910130434	申请日期	1991.05.02
申请人	MITSUBISHI ELECTRIC CORP	发明人	ISHIBA TERUAKI
分类号	B05C11/08;B05D1/40;G03F7/16;H01L21/027	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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