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发明名称
HEAT-TREATMENT METHOD AND TREATMENT METHOD
摘要
申请公布号
JPH04330719(A)
申请公布日期
1992.11.18
申请号
JP19910019546
申请日期
1991.01.18
申请人
TOKYO ELECTRON LTD
发明人
KUREBAYASHI TAKESHI
分类号
H01L21/22;H01L21/223
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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