| 摘要 |
PURPOSE:To accurately and easily regulate a gap size in a preliminary ionization ultraviolet generator of a pulse laser oscillator. CONSTITUTION:One platelike conductor 20 is mounted on a plurality of capacitors 2a arranged in parallel adjacent to one main discharge electrode 1a. On the other hand, pins 21 are respectively mounted at a plurality of capacitors 2b arranged in parallel adjacent to the other main discharge electrode 1b, and a preliminary ionization ultraviolet generator 7 is formed between the conductor 20 and the pins 21. The mounting positions of the pins 21 and the capacitors 2b mounted therewith are regulated by suitably adjusting stationary parts 8. |
