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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH04324633(A)
申请公布日期
1992.11.13
申请号
JP19910094544
申请日期
1991.04.25
申请人
FUJITSU LTD
发明人
KASUDA MASANORI
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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