| 摘要 |
PURPOSE:To continuously produce high-quality SiC whisker on an industrial scale in high efficiency, by combining a fluidized layer preliminary reaction vessel for generating silicon sulfide with a fluidized layer main reaction vessel for forming whisker and a transportation pipe in a manner to effect a specific action. CONSTITUTION:Metallic silicon 2 which is one of raw materials is continuously or intermittently supplied to the lower part of a fluidized layer preliminary reaction vessel 1 for generating silicon sulfide. The reaction vessel 1 is provided with an exhaust port 3 for produced gas at the top and a reaction gas introduction port 5 and a carrier gas introduction port 6 at the bottom. A gas-distribution plate 4 having a number of gas blasting holes is placed above each gas inlet ports 5, 6 and metallic silicon 2 is charged and held on the distribution plate 4. Hydrogen sulfide gas and a carrier gas (e.g. H2) are introduced in mixed state into the reaction vessel 1 through gas introduction ports 5, 6 and made to contact and react with metallic silicon 2 to generate silicon sulfide vapor, which is exhausted together with the carrier gas through the exhaustion port 3 opened at the top of the vessel 1. The silicon sulfide vapor is transferred to the fluidized layer main reaction vessel 8 in hot state. The objective whisker is deposited and grown in the main reaction vessel 8. |
