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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04320347(A)
申请公布日期
1992.11.11
申请号
JP19910088281
申请日期
1991.04.19
申请人
SUMITOMO ELECTRIC IND LTD
发明人
YAMADA TORU
分类号
H01L21/265;H01L21/28;H01L21/338;H01L29/812
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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