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发明名称
METHOD OF AND APPARATUS FOR MEASURING PATTERN PROFILE
摘要
申请公布号
US5161201(A)
申请公布日期
1992.11.03
申请号
US19910651796
申请日期
1991.02.07
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
KAGA, YASUHIRO;HATTORI, KEI;HASEGAWA, ISAHIRO;KOMATSU, FUMIO
分类号
G01Q30/02;G01B15/00;G01Q30/04
主分类号
G01Q30/02
代理机构
代理人
主权项
地址
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