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发明名称
WAFER BOAT MACHINING DEVICE
摘要
申请公布号
JPH04310370(A)
申请公布日期
1992.11.02
申请号
JP19910071407
申请日期
1991.04.04
申请人
TOSHIBA CERAMICS CO LTD
发明人
KAWAMURA TAKAFUMI;HARADA MASASHI
分类号
B24B55/02
主分类号
B24B55/02
代理机构
代理人
主权项
地址
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