| 摘要 |
<p>PURPOSE:To facilitate a replacement of a gas adsorption filter for use in removing toxic gas generated within a clean room. CONSTITUTION:Since a gas adsorption filter is fixed on a filter device 14 of a ceiling room 15, an air supplying power is reduced and a fixing of the gas adsorption filter may easily be carried out. This gas adsorption filter is comprised of grid structure active carbons 40 arranged and disposed within a frame 52. The active carbons 40 are formed with grid-like through-pass holes 42, so that a pressure loss of air flow passing therethrough is low. In addition, some shock absorbing materials 46 are disposed among the active carbons 40 and a dust removing filter 56 is disposed at a downstream side of the active carbons 40, so that the number of generated fine particles from the active carbons 40 is low.</p> |
