ALIGNMENT METHOD

摘要

PURPOSE:To provide an alignment method which enables accurate detection of alignment marks even in the case where a processed object and an image sensing means are under fixed conditions. CONSTITUTION:Images of alignment marks 10 provided in the predetermined region on a processed object 1 are taken with cameras 6 for alignment. The alignment mark 10 is composed of a center mark indicating the center position and a plurality of supplementary marks which are provided in the predetermined position along the alignment direction from the center mark so that the area occupied by the alignment mark becomes sufficient for the viewing field of an image sensing means. Deviation of the center position of the alignment mark is detected from the obtained image information. The alignment of the processed object is carried out depending on such deviation.