| 摘要 |
The present monitoring system for monitoring operation of a laser system includes, in one embodiment, respective optical sensors coupled to respective, selected optical components. Each optical sensor, in operation, generates signals indicative of optical signal radial leakage of a respective optical component. When the radial leakage of a respective optical component. When the radial leakage-indicative signal from an optical sensor exceeds a predetermined threshold, operation of the laser system is interrupted.
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