| 摘要 |
A pinching gate valve for isolating the inside of a vacuum chamber equipped with a slot for passageway of a continuous substrate web therethrough. The pinching gate valve contains three components: a base plate having two inclined first sealing surfaces surrounding a substrate slot; a pair of mating jaws mounted for reciprocal movement toward and away from each other, each of said jaws including an inclined, second sealing surface for mating engagement with one of the first sealing surfaces, and a flat clamping surface for engagement with a surface of the substrate web; and means for reciprocating the jaws from a first, open position, to a second, clamping position.
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