| 摘要 |
PROBLEM TO BE SOLVED: To improve the productivity of a wire grid polarizer, in a method for manufacturing the wire grid polarizer. SOLUTION: The method for manufacturing the wire grid polarizer has a resin stamper forming process of forming a resin stamper 50, by transferring a fine irregular shape of a metal stamper 3; a mold-releasing treatment process of carrying out mold releasing treatment on a surface of the resin stamper 50, a metal film forming process of forming a metal film 7 on a base material film 1a; a resin molding process of applying a UV-curing resin 110a onto the metal film 7, holding the resin stamper 50, subjected to the mold-releasing treatment in a pressurizing state onto the UV-curing resin 110a and curing the UV-curing resin 110a, by irradiation with UV rays 114a from a resin stamper 50 side; and a resin stamper exfoliating process of exfoliating the resin stamper 50 to form a resin grid layer 8, where the fine irregular shape is transferred and an etching process of etching the metal film 7 by using the resin grid layer 8 as a mask. COPYRIGHT: (C)2009,JPO&INPIT |
