| 摘要 |
PURPOSE:To enhance sensitivity, remaining film endurance, resolution, and dimension controllability by incorporating an alkalisoluble phenol resin and a mixture of the esters of a specified phenolic compound as a photosensitive agent. CONSTITUTION:The ester of quinonediazido-sulfonic acid and the hydroxyl group of one of the phenol compounds represented by formula I and II and the esters of its hydroxyl groups and sulfonic acid represented by formula III and/or the esters of those and carboxylic acid represented by formula IV, and the alkali-soluble phenol resin are incorporated as the photosensitive agent. In formulae I-IV, each of R<1>-R<6> is H, halogen, or the like; R<7> is H, 1-4C alkyl, or the like; each of R<8> and R<9> is H, OH, or the like; each of R<10>-R<12> is H, halogen, or the like; R<13> is H, 1-4C alkyl, or the like; R<14> is optionally substituted alkyl or such aryl; R<15> is alkyl or aryl, or the like. |
