| 摘要 |
PURPOSE:To obtain an AlN sintered compact having a high thermal conductivity and a smooth and homogeneous surface by examining the relation between the disintegrating and kneading time and the oxygen content of a degreased compact and determining the disintegrating an kneading time so as to provide a desired oxygen content in the resultant sintered compact. CONSTITUTION:A sintering assistant and a binder are added to AlN powder and disintegration, kneading and forming of the prepared mixture are carried out. The formed compact is then degreased in an atmosphere of N2 to produce a degreased compact, which is subsequently burned in an N2 gas stream to produce the objective AlN sintered compact. In the process, the relation between the disintegrating and kneading time and the oxygen content of the degreased compact is preexamined. Furthermore, the disintegration and kneading are performed for a prescribed time produce the AlN sintered compact. Thereby, the oxygen content of the AlN sintered compact is determined. The disintegration and kneading time so as to provide the oxygen content of the AlN sintered compact within a desired range is then obtained based on the determined oxygen content and the aforementioned relation. After carrying out the disintegration and kneading for the resultant time, forming, degreasing and burning are performed to afford the objective AlN sintered compact having the oxygen content within the desired range. |
