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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH04288868(A)
申请公布日期
1992.10.13
申请号
JP19910052843
申请日期
1991.03.18
申请人
OKI ELECTRIC IND CO LTD
发明人
KIMURA TATSUYA
分类号
H01L27/06;H01L21/331;H01L21/336;H01L21/8232;H01L21/8249;H01L29/73;H01L29/732;H01L29/78
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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