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发明名称
FORMATION OF POLYCRYSTALLINE SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH04287311(A)
申请公布日期
1992.10.12
申请号
JP19910051937
申请日期
1991.03.18
申请人
OKI ELECTRIC IND CO LTD
发明人
KAKINUMA HIROAKI;MORI MIKIO;SAKAMOTO KATSUAKI
分类号
H01L21/205;H01L21/84
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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