| 摘要 |
PURPOSE:To improve the preserbility of a positive type radio-sensitive resin compsn. to a change in the sensitivity and a change in the viscosity as a soln. by adding a compd. having a specified structure to the resin compsn. contg. an alkali-soluble resin and a 1,2-quinonediazido compd. CONSTITUTION:A compd. having one of groups represented by formulae I-IV in a molecule is added to a radiation sensitive resin compsn. by 0.001-10 pts.wt. per 100 pts.wt. alkali-soluble resin in the compsn. Compds. separately having groups represented by the formulae I-IV are, e.g. 4-amino-2,2,6,6- tetramethylpiperidine, 2,2,5,5-tetramethylpyrrolidine-3-carboxamide, 2,2,4- trimethyl-1,2-dihydroquinoline and 2,2,4-trimethyl-1,2,3,4-tetrahydroquinoline. In the formulae I-IV, each of R<1>-R<12> is 1-4C alkyl and R<1>-R<12> may be different from each other. |
