| 摘要 |
PURPOSE:To provide the effect of not requiring working for forming a spacing to stoppers as the spacings between the stoppers and weight parts are determined by the diameter of fine spherical particles. CONSTITUTION:Adhesive parts 6 formed by mixing the fine spherical particles 10 having a uniform diameter and an adhesive 11 are formed at the time of adhering the stoppers 4, 5 to the top and bottom of a sensor chip 1. Gaps 8, 9 can, therefore, be maintained while the surfaces of the stoppers 4, 5 remain flat. |
