| 摘要 |
<p>PURPOSE:To obtain the pellicle which can absorb the water existing in a gaseous state into a hermetic state enclosed with a reticule, a light transparent thin film and a frame particularly when the pellicle which includes the frame and the pellicle and is mounted to both surfaces of the reticule or mask which is a dry plate for exposing. CONSTITUTION:The pellicle constituted by depositing a tacky adhesive material 12 on the rear surface of the frame 21 and developing the light transparent thin film 14 on the front surface of the frame 21 is constituted by providing a desiccating agent housing groove 21a housing a desiccating agent 22 to absorb the water 16 in the gaseous state on the front or rear surface of the frame 21 and providing vent holes 21b extending from the desiccating agent housing groove 21a to the inner side face thereof.</p> |
