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发明名称
FORMING METHOD OF PATTERN
摘要
申请公布号
JPH04264777(A)
申请公布日期
1992.09.21
申请号
JP19910024495
申请日期
1991.02.19
申请人
OKI ELECTRIC IND CO LTD
发明人
NISHI SEIJI
分类号
H01L29/417;H01L21/338;H01L29/80;H01L29/812
主分类号
H01L29/417
代理机构
代理人
主权项
地址
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