Ultra-high efficiency porous metal filter.

摘要

An ultra-high efficiency particulate air filter for use in the microelectronics manufacturing industry is formed as a fully homogeneous sintered metal filter that exhibits an efficiency substantially in excess of a 6 log reduction and preferably equal to or exceeding a 9 log reduction (an efficiency of 99.9999999%). The filter can be used as a process gas in-line filter in state of the art gas supply systems. The porous metal filter exhibits long term stability relative to mechanical or thermal stress and operates within the desired ultra-high efficiency levels even under high pressure conditions. It does not exhibit an outgasing problem and there is no particle shedding. These features are provided within a unit no larger than those conventionally employed heretofore with organic membranes and under substantially identical operating conditions.