ILLUMINATOR AND PROJECTION EXPOSING DEVICE

摘要

PURPOSE:To obtain illuminating light whose coherence is changeable while efficiently utilizing light emitted from a light source and to obtain a projection exposing device capable of exposure by using a coherence condition according to various conditions without sacrificing throughput. CONSTITUTION:The light emitted from a first light source 1 is made incident on a fly eye integrator 9 by an optical system including an elliptic face mirror and when a second light source constituted of plural converging light points is formed by the fly eye integrator 9, the size of the second light source is made changeable by making the relative positional relations between the form of the elliptic mirror, or the first light source or the elliptic mirror and the fly eye integrator 9 changeable.