| 摘要 |
PURPOSE:To improve the efficiency of a maintenance operation by simplifying the procedures for automatically correcting the position to be irradiated with a laser beam. CONSTITUTION:A photoelectric converter 10 reads image data via a two-dimensional scanning type beam positioner 4 from a work 9 which is previously imparted with marks 16. A computer 14 calculates the positional deviation of the two-dimensional scanning type beam positioner 4 from the coordinate values of the respective marks 16 in this image data and the data input value previously inputted thereto. The computer 14 forms a correction data table in accordance with the calculated positional deviation of the two-dimensional scanning type beam positioner 4. |
