METHOD FOR PURIFYING HYDROGEN PEROXIDE FOR MICROELECTRONICS USES

摘要

A method for further purifying previously distilled hydrogen peroxide for use in microelectronics in which a hydrogen peroxide Starting solution purified initially by distillation is contacted, after the addition of a small amount of chelating agent, with a non-ion-exchanging polymeric adsorbent, such as a styrene-divinylbenzene copolymer, to obtain a highly purified hydrogen peroxide solution which satisfies the stringent purity requirements for use in producing 4-megabit and 16-megabit microprocessor chips.