OPTICAL APPARATUS

摘要

PURPOSE: To provide a device where an object and an image are collectively scanned by realizing the image with the same orientation as that of the object on an object plane. CONSTITUTION: Plural and substantially planar reflection surfaces 20 and plural curved reflection surfaces 22 are provided, a mask 2 and a copying substrate 42 are substantially and mutually fixed to relative positions and scanning is executed in an optical system in a state where the mask and the copying substrate are simultaneously moved in a same direction or a mask plane and an image plane are substantially made to be still and also mutually and relatively fixed so that an optical projecting system capable of scanning a mask object on the image plane is provided. In the optical system, the mask is aligned on the copying substrate through the use of the electromagnetic radioactive rays of a certain wave length and the image of the mask is formed on the copying substrate through the use of the electromagnetic radioactive rays of another wave length.