| 摘要 |
PURPOSE:To prolong service life of a ultrasonic motor by forming the sliding face of any one of two elastic members of a silicon carbide(SiC) while the other of chromium oxide(Cr2O3) thereby lowering specific abrasion in sliding. CONSTITUTION:In a ultrasonic oscillator 11, a first piezoelectric member 22 for actuating bending oscillation is mounted on the top face of an elastic member 21. Second piezoelectric members 23a, 23b for actuating longitudinal oscillation are mounted on the side face crossing perpendicularly therewith. In a ultrasonic motor comprising the ultrasonic oscillator 11, the sliding face of any one of two elastic members is formed of silicon carbide(SiC) while the other is formed of chromium oxide(Cr2O3). According to the invention, a ultrasonic motor having drastically low specific abrasion and operates stably for a long term can be realized. |
