发明名称 PATTERN RECOGNITION
摘要 <p>PURPOSE:To enable execution of each test item by in-process at a low cost. CONSTITUTION:Before a camera recognizes a pattern 11 exceeding a recognizable range (X11XY11), a region of the pattern 11 is divided into a plurality of regions (12a-12a), and the camera is moved every region to pick up image, so as to compose a plurality of picked-up images into one image (AXB) for pattern recognition.</p>
申请公布号 JPH04242950(A) 申请公布日期 1992.08.31
申请号 JP19910000243 申请日期 1991.01.07
申请人 TOSHIBA CORP 发明人 KOBAYASHI HIROAKI
分类号 H01L21/52;G06K9/78;G06T7/00;H01L21/60;H01L21/66 主分类号 H01L21/52
代理机构 代理人
主权项
地址