| 摘要 |
PURPOSE:To reduce a weight by providing an installation stand for installing various optical systems inside an airtight container separated from the airtight container. CONSTITUTION:A window 21 is formed to an approximately rectangular tube shape air-tightly in one end part. An airtight container 22 whose inside pressure is adjusted by a pressure adjusting means is provided. A magnifying optical system 23, a cylindrical lens 24, an etalon 25 and a grating 26 are provided almost coaxially on the installation stand 27 in the inside as they are apart from the window 21. The installation stand 27 is provided as mounted on a bottom 22a of the airtight container 22 through two positioning pins 32a, 32b and a base 33. Thereby, laser oscillation can be performed stably without making the constitution heavy. |
