发明名称 |
DEVICE FOR PRE-IONIZATION IN DISCHARGE-PUMPED GAS LASERS, IN PARTICULAR FOR X-RAY PRE-IONIZATION |
摘要 |
Preionization is important for the generation of a homogeneous glow discharge in the gas space of a laser chamber between laser electrodes. TE type excimer lasers operate especially with X-ray preionization, for which high voltage pulses are needed. According to the present invention, the voltage pulses are obtained by means of an auxiliary circuit that includes a branch which is connected in parallel with a high voltage switch or with the laser discharge gap and which incorporates a saturable magnetic inductance and the primary winding of a high voltage pulse transformer connected in series therewith. The high voltage triggering pulses for the preionization element, which is an X-ray tube in particular, are generated in the secondary winding of the transformer. If the branch is connected in parallel with the high voltage switch it also has a series capacitor. If it is in parallel with the laser discharge gap then the branch has a shunt capacitor. In this way, the timing of the preionization and in particular the X-ray pulse, can be adjusted precisely in relation to the voltage rise time through the laser electrodes and in relation to the laser.
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申请公布号 |
US5142547(A) |
申请公布日期 |
1992.08.25 |
申请号 |
US19900604973 |
申请日期 |
1990.10.25 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
CIRKEL, HANS-JUERGEN;BETTE, WILLI |
分类号 |
H01S3/097;H01S3/0971;H01S3/0977 |
主分类号 |
H01S3/097 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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