| 摘要 |
PURPOSE: To manufacture an optical integrated circuit integrated on one substrate by connecting a microguide, a separating plate, a lens, etc. CONSTITUTION: A 1st mask having a pattern fixed size in a fixed shape is formed and the anisotropic etching of the substrate which is not protected with the mask is performed so as to form a cavity (20) having a vertical flank. This mask is removed and the thermal oxidation of the vertical flank is performed so as to constitute a mask and a stop layer (31) which are useful for a main stage. A mask (12) having a pattern of fixed size in a fixed shape is formed. The substrate which is not protected with the mask is so performed that at least one cavity (13) in an undesiered shape is obtained. Thermal oxidation is performed to form peripheral layers (15, 16a, 16b, and 16c) of constant given thickness over part or the whole of the internal surface of the cavity. Then the cavity is filled (17 and 18) with a proper material. |
