| 摘要 |
PURPOSE:To offer an X-ray aligner with which enough X-ray irradiation region can be kept without enlarging window area for the X-ray bringing-out, and improvement of through-put can be intended by decreasing X-ray attenuation at the X-ray bringing-out window. CONSTITUTION:The device is provided by a synchrotron 11 generating X-ray, an X-ray reflecting mirror 13 reflecting the X-ray radiated from the synchrotron 11, a mirror driving mechanism to vibrate the mirror 13 and to enlarge the X-ray irradiation region, an X-ray bringing-out window 14 connected to a synchrotron-side base housing the mirror 13 through a bellows 17, and bringing- out the X-ray reflected by the mirror 13, to outside of vacuum, and a window driving mechanism vibrating the window 14 synchronously to vibration of the mirror 13, and moving the window 14 along with movement of X-ray irradiation position. The X-ray brought-out from the window 14 irradiates a sample 16 through an X-ray mask 15 and exposes a mask pattern on the sample 16. |
