Chemical vapor deposition process where an alkaline earth metal organic precursor material is volatilized in the presence of an amine or ammonia and deposited onto a substrate

摘要

A method is disclosed for the volatilization and transport of an alkaline earth metal precursor. The presence of an amine or ammonia significantly increases transport of the voltalized alkaline earth metal precursor as compared to transport under the same conditions but without the amine or ammonia.