NEW POLYFUNCTIONAL COMPOUNDS CONTAINING ALPHA-DIAZO-BETA- KETOESTER UNIT AND SULFONIC ESTER UNITS, PROCESS FOR PREPARING SAME AND USE THEREOF

摘要

Polyfunctional compounds containing alpha -diazo- beta -keto ester units and sulfonate units are disclosed. The polyfunctional compounds have high sensitivity in the deep UV and high thermal stability. Processes for producing the compounds are disclosed. A preferred process first synthesizes beta -ketoester/sulfonate precursors and then uses diazo transfer to convert the precursors into the novel compounds. Radiation-sensitive mixtures containing the compounds are also disclosed.