| 摘要 |
PURPOSE:To obtain an excimer laser having small electrode consumption and high reliability by forming a main discharge for exciting in which the discharging width of the main discharge is wider than the length of a gap between main electrodes. CONSTITUTION:A discharge is generated through a dielectric element 7 in the holes of a perforated electrode 6 by a voltage applied by the electrode 6 and an auxiliary electrode 8, and seed electrons are supplied to the vicinity of the surface of the electrode 6 by the photoionization by ultraviolet light therefrom, or by the direct supply of electrons, etc. Then, the electrons are multiplied based on the seed electrons by the voltage applied between one main electrode 1 and the electrode 6, and a spatially uniform main discharge 2 is generated. In this case, since an auxiliary ionization is conducted from the surface of the opened electrode to become the other main electrode surface, if the width of the opening is widened, a uniform exciting main discharge having wider discharge width than the length of a gap between the electrodes and no pinhole is formed. Thus, an excimer laser having small electrode consumption, a long life and high reliability can be realized. |
