Surface processing method using charged or not charged particles and apparatus for carrying out the same.

摘要

The present invention provides a surface processing method capable of processing the surface of a work at a high processing rate without damaging the surface of the work by using, in combination, a fast processing technique using charged particles and a moderate processing technique using neutral particles that scarcely damage the surface of the work,and a surface processing apparatus suitable for carrying out the surface processing method. In carrying out a surface treatment process, the substrate is processed in a moderate surface processing mode using neutral particles when the substrate is exposed substantially to charged particles, and the substrate is processed in a fast surface processing mode using charged particles when the substrate is not exposed substantially to charged particles to achieve the surface treatment process at a high processing rate without damaging the surface of the substrate.