| 摘要 |
PURPOSE:To detect the position of a detected face with high accuracy by projecting straight line shape pattern beams of the specified length to the detected surface, and detecting the projection area of the pattern beams on the detected surface in the plurally divided state. CONSTITUTION:Illuminating beams from light source 11 radiate and pass a projection slit plate 13 through a condenser lens 12, and converge on the detected surface 1 intersecting the optical axis AX of a projection lens L, at the specified incident angle alpha by a radiation objective lens 14 and a reflecting mirror 10M. The reflected light from the detected surface 1 is reflected by a reflecting mirror 20M, then subjected to the converging action of a condenser objective lens 21, and reflected by a vibrating mirror 22. The beams converging on a light receiving slit 23 are detected by a photoelectric conversion element 24. A detecting part 24 then performs the separate, simultaneous wave detection of unfocused quantity from the reference position of the detected surface 1 and inclination to the reference position. The position of the detected surface 1 can be thereby detected with higher accuracy. |
