| 摘要 |
PURPOSE:To provide a solar battery which has no deterioration in characteristic due to etching residue, no influence of residual fine particles, no diffusion of electrode material into a semiconductor layer, no deterioration in characteristic due to distortion of a substrate, and a high optoelectric transducing efficiency. CONSTITUTION:In a solar battery which is built up by depositing a p-type semiconductor layer made of non-single crystal containing silicon 105, i-type semiconductor layer 104 which is made of non-single crystal containing silicon that serves for an active layer 104 and n-type semiconductor layer made of non-single crystal containing silicon 103 on a conductive substrate 101, both of the p-type layer 105 and n-type layer 103 or either of the two layers is permitted to contain carbon atoms and the i-type layer 104 is permitted to hold germanium atoms which are distributed in the layer thickness direction and a diamond layer 102 which has the uneven surface that contains a valence electron control agent is deposited between the conductive substrate 101 and the semiconductor layers. |
