| 发明名称 |
APPARATUS FOR PURIFYING LASER GAS |
| 摘要 |
An apparatus for purifying laser gas, in particular for excimer and F2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liquid nitrogen (12).
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| 申请公布号 |
US5136605(A) |
申请公布日期 |
1992.08.04 |
| 申请号 |
US19910670743 |
申请日期 |
1991.03.15 |
| 申请人 |
LAMBDA PHYSIK GESELLSCHAFT ZUR HERSTELLUNG VON LASERN MBH |
发明人 |
BASTING, DIRK;STEINFUEHRER, GERD;VOSS, FRANK |
| 分类号 |
B01D8/00;H01S3/03;H01S3/036;H01S3/225 |
主分类号 |
B01D8/00 |
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