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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04213828(A)
申请公布日期
1992.08.04
申请号
JP19900400993
申请日期
1990.12.10
申请人
FUJITSU LTD
发明人
MIYAJIMA MOTOMORI
分类号
H01L21/306;H01L21/76
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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