发明名称 METHOD AND APPARATUS FOR NON-CONTACT MEASURING OF OBJECT SURFACES
摘要 Two bar patterns are projected sequentially on the object (O) to be measured, e.g., by time-division multiplexing, at angles which are inclined toward each other. The bar patterns are produced by projectors having respective rectangular gratings. The periods of the gratings are the same, and the phase relationship of the gratings is fixed relative to each other. Each reflected bar pattern, as distorted by the surface of the object, is individually and sequentially recorded by a camera (K); and the bar phases ( psi 1, psi 2) of each sequentially reflected bar pattern are calculated for each image point by a computer connected with the camera. The computer also computes the differences ( DELTA psi ) between the bar phases of the two projections for each image point. These phase differences remain stationary even when the bar patterns are moved relative to the camera. A plurality of phase differences for each image point is stored, averaged, and then used to calculate the height measurement (z) for each image point for display on a television monitor (42).
申请公布号 US5135308(A) 申请公布日期 1992.08.04
申请号 US19910666363 申请日期 1991.03.08
申请人 CARL-ZEISS-STIFTUNG 发明人 KUCHEL, MICHAEL
分类号 G01B11/24;G01B11/25;G01C3/06 主分类号 G01B11/24
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