发明名称 COMPOSITION FOR FORMING PALLADIUM OR PALLADIUM ALLOY THIN FILM AND ITS MANUFACTURE
摘要 <p>PURPOSE:To form a dense thin film fine line in which the number of films to be laminated can remarkably be increased by specifying the components of a conductive composition and their ratios. CONSTITUTION:The composition for forming a palladium or palladium alloy thin film in this invention is as follows. Namely, it is a one contg., simple grain dispersed ultrafine powder of palladium or a palladium alloy having 30 to 1000Angstrom average grain size by 5 to 70wt.% as metal, simple grain dispersed ultrafine powder of rhodium or iridium having 30 to 1000Angstrom average grain size by 0.005 to 1.0wt.% as metal, arbitrarily contg. simple grain dispersed ultrafine powder of gold having 30 to 1000Angstrom average grain size by 2.5 to 35wt.% as metal and furthermore 0.5 to 10wt.% of one or more kinds among lead, boron, silicon, bismuth, vanadium, Ti and Ba having the same grain size.</p>
申请公布号 JPH04210481(A) 申请公布日期 1992.07.31
申请号 JP19900410154 申请日期 1990.12.13
申请人 N E CHEMCAT CORP;SHINKUU YAKIN KK 发明人 SATO JUNJI;TAKAHASHI KATSUMI;ODA MASAAKI
分类号 H05K1/09;C23C24/00;H01C7/00 主分类号 H05K1/09
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