LOW ENERGY ION IMPLANTATION DEVICE,申请号JP19900337328-传众专利搜索

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发明名称	LOW ENERGY ION IMPLANTATION DEVICE
摘要
申请公布号	JPH04206428(A)	申请公布日期	1992.07.28
申请号	JP19900337328	申请日期	1990.11.30
申请人	SHIMADZU CORP	发明人	KAIMOTO AKIRA
分类号	H01L21/265;C23C14/48;H01J23/18;H01J37/317	主分类号	H01L21/265
代理机构		代理人
主权项
地址

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