FORMATION OF SUBSTRATE FOR EVALUATION,申请号JP19900329094-传众专利搜索

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发明名称	FORMATION OF SUBSTRATE FOR EVALUATION
摘要
申请公布号	JPH04206541(A)	申请公布日期	1992.07.28
申请号	JP19900329094	申请日期	1990.11.30
申请人	HITACHI LTD	发明人	SAITO AKIO;OKA HITOSHI
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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