MAGNETRON SPUTTERING SYSTEM,申请号JP19900338750-传众专利搜索

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发明名称	MAGNETRON SPUTTERING SYSTEM
摘要
申请公布号	JPH04202771(A)	申请公布日期	1992.07.23
申请号	JP19900338750	申请日期	1990.11.30
申请人	MITSUBISHI KASEI CORP	发明人	ARITA YOJI
分类号	C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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