| 摘要 |
<p>PURPOSE:To obtain a method for forming a plated electrode wherein local plating is easily and precisely performed on an ohmic electrode, by a method wherein, after an ohmic electrode whose main component is Zn and Ag is formed on a nonlinear resistor, activation process is chemically performed, without activating the resistor surface and without dissolving the ohmic electrode. CONSTITUTION:An ohmic electrode 5 is formed by coating a nonlinear resistor 4 with ohmic paste and baking it. Since the surface of the nonlinear resistor is not etched when the resistor is dipped in weak acid, the inactive state is maintained, and the surface resistance is not decreased. The surface of the ohmic electrode is etched, and an oxide layer is eliminated. As a result, the surface is activated, and the surface resistance is decreased. When the surface is plated, metal ions are selectively attracted only by the ohmic electrode whose surface resistance is low, and a plated electrode 6 can be formed. Hence position deviation is not generated between the ohmic electrode and the plated electrode, and the fine pattern of an electrode can be formed, so that a uniform electrode free from appearance defects can be obtained.</p> |
