发明名称 PROCESSING EQUIPMENT
摘要 PURPOSE:To obtain a processing equipment wherein the radundant movement of a conveying equipment is eliminated and the processing efficiency of an object to be treated is improved, by connecting a plurality of sets of processing part groups in the manner in which objects to be treated can be carried between the processing part groups in each of the adjacent sets. CONSTITUTION:One set of processing part groups 10 is constituted by arranging two or more processing parts 26, 28 around a rotary carriage arm 24. A plurality of the sets are connected so as to be able to carry objects to be treated between the processing part groups in each sets. Hence the longitudinal distance of an arrangement space is remarkably reduced, and space reduction can be attained. Since a common rotary carriage arm is provided in one set of the processing part groups, the carrying domain of said arm is minimized, and carrying efficiency is improved. Thereby the throughput is not decreased, while the number of driving sources is reduced and energy reduction is attained by constituting the common arm. Further the processing part groups in each set are turned into units 10, 12, 14, and said units are combined, so that processing parts of suitable number for each kind of processing equipment can easily be obtained, and general-purpose properties can be improved.
申请公布号 JPH04196530(A) 申请公布日期 1992.07.16
申请号 JP19900331311 申请日期 1990.11.28
申请人 TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK 发明人 KAMIKAWA YUJI
分类号 H01L21/677;H01L21/00;H01L21/304 主分类号 H01L21/677
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