THIN FILM FORMING APPARATUS,申请号KR19880012594-传众专利搜索

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发明名称	THIN FILM FORMING APPARATUS
摘要
申请公布号	KR920005624(B1)	申请公布日期	1992.07.10
申请号	KR19880012594	申请日期	1988.09.29
申请人	SUMITOMO METAL IND. LTD.	发明人	AKAHORI, TAKASHI;NAKAYAMA, SATOSHI
分类号	C23C16/48;C23C16/54;(IPC1-7):C23C16/48	主分类号	C23C16/48
代理机构		代理人
主权项
地址

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